CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

A cascadable resonator logic system includes a substrate; a first straight beam anchored with a first end to the substrate; a second straight beam anchored with a first end to the substrate; a first arch beam, which is curved, and is attached with a first end to a second end of the first straight be...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TELLA, Sherif Adekunle, YOUNIS, Mohammad Ibrahim
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PULSE TECHNIQUE
TRANSPORTING
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Beschreibung
Zusammenfassung:A cascadable resonator logic system includes a substrate; a first straight beam anchored with a first end to the substrate; a second straight beam anchored with a first end to the substrate; a first arch beam, which is curved, and is attached with a first end to a second end of the first straight beam, at a first joint, and with a second end to a second end of the second straight beam, at a second joint, so that both the first and second ends of the first arch beam are suspended above the substrate; and a second arch beam, which is also curved, and is attached with a first end to the second joint, and a second end is anchored to the substrate.