ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been r...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Miller, Thomas Gary, Young, Richard, Flanagan, IV, John F, Shrotre, Aditee, Routh, JR., Brian, Larson, Brad
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS SEMICONDUCTOR DEVICES
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