ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING

Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been r...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Miller, Thomas Gary, Young, Richard, Flanagan, IV, John F, Shrotre, Aditee, Routh, JR., Brian, Larson, Brad
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.