POLISHING COMPOSITIONS AND METHODS OF USING THE SAME

This disclosure relates to a polishing composition that includes at least one abrasive; at least one pH adjuster, and at least one biosurfactant, as well as a method of using the polishing composition to polish a substrate. The biosurfactant can be selected from the group consisting of glycolipids,...

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Bibliographische Detailangaben
Hauptverfasser: Turner, Eric, Schaefer, Zachary L, Ballesteros, Carl
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:This disclosure relates to a polishing composition that includes at least one abrasive; at least one pH adjuster, and at least one biosurfactant, as well as a method of using the polishing composition to polish a substrate. The biosurfactant can be selected from the group consisting of glycolipids, lipopeptides, and mixtures thereof.