LIGHT REFLECTING ELEMENT AND SPATIAL LIGHT MODULATOR

A light reflecting element includes a support part 21, a hinge part 30, and a light reflecting part 40, in which the light reflecting part 40 includes a support layer and a light reflecting layer 50, the hinge part 30 includes a torsion bar portion 31, extending portions 34A and 34B extending from s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANAGAWA, SHUSAKU, KAKOIYAMA, NAOKI
Format: Patent
Sprache:eng
Schlagworte:
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