LIGHT REFLECTING ELEMENT AND SPATIAL LIGHT MODULATOR

A light reflecting element includes a support part 21, a hinge part 30, and a light reflecting part 40, in which the light reflecting part 40 includes a support layer and a light reflecting layer 50, the hinge part 30 includes a torsion bar portion 31, extending portions 34A and 34B extending from s...

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Bibliographische Detailangaben
Hauptverfasser:	YANAGAWA, SHUSAKU, KAKOIYAMA, NAOKI
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A light reflecting element includes a support part 21, a hinge part 30, and a light reflecting part 40, in which the light reflecting part 40 includes a support layer and a light reflecting layer 50, the hinge part 30 includes a torsion bar portion 31, extending portions 34A and 34B extending from sides of the torsion bar portion 31, and movable pieces 35A and 35B extending from ends of the extending portions 34A and 34B, an end of the torsion bar portion 31 is fixed to the support part 21, the hinge part 30 is capable of being twisted and deformed around an axis of the torsion bar portion 31, the support layer is fixed to the movable pieces 35A and 35B, a recess 41D is provided at least in a portion of the support layer facing a space 35D located between the first movable piece 35A and the second movable piece 35B, and a stress adjusting layer 91 is provided on the support layer in parallel to the light reflecting layer 50 and separated from the light reflecting layer 50.