PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING THE SAME

PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING THE SAME

For a piezoelectric device, an optical characteristic and/or a piezoelectric characteristic is improved. A piezoelectric device has a first electrode layer, a second electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, wherein the piez...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAGAOKA, Naoki, NAKAMURA, Daisuke, MACHINAGA, Hironobu, KUROSE, Manami
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:For a piezoelectric device, an optical characteristic and/or a piezoelectric characteristic is improved. A piezoelectric device has a first electrode layer, a second electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, wherein the piezoelectric layer is formed of a wurtzite crystal material as a main component, to which one or more elements is/are added, said one or more elements being transparent when turned into an oxide, and wherein a haze value is 3% or less, and transmittance with respect to light having a wavelength of 380 nm is 50% or more.