ARRAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME, AND DISPLAY APPARATUS

A preparation method for an array substrate, comprising: providing a substrate; forming multiple wires on the substrate; forming an oxide semiconductor thin film on the side of the multiple wires furthest from the substrate, the oxide semiconductor thin film covering the multiple wires and being in...

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Bibliographische Detailangaben
Hauptverfasser: ZENG, Yong, LI, Liangliang, CHEN, Zhouyu, HUO, Yazhou, LIN, Bin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A preparation method for an array substrate, comprising: providing a substrate; forming multiple wires on the substrate; forming an oxide semiconductor thin film on the side of the multiple wires furthest from the substrate, the oxide semiconductor thin film covering the multiple wires and being in direct contact with at least one signal line, the at least one wire being configured to guide out the static electricity produced in the oxide semiconductor thin film; and, by using a photolithography process, performing patterning processing on the oxide semiconductor thin film to remove the part in direct contact with the at least one wire and form an oxide semiconductor layer comprising active layers of multiple oxide thin film transistors.