METHODS FOR FABRICATING A 3-DIMENSIONAL MEMORY STRUCTURE OF NOR MEMORY STRINGS

METHODS FOR FABRICATING A 3-DIMENSIONAL MEMORY STRUCTURE OF NOR MEMORY STRINGS

A process for manufacturing a 3-D NOR memory array provides thin-film storage transistors of each NOR memory string in either shafts or portions of a trench between adjacent shafts.

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Bibliographische Detailangaben
Hauptverfasser: Harari, Eli, Purayath, Vinod
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
INFORMATION STORAGE
PHYSICS
STATIC STORES
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Beschreibung
Zusammenfassung:A process for manufacturing a 3-D NOR memory array provides thin-film storage transistors of each NOR memory string in either shafts or portions of a trench between adjacent shafts.