ROTATIONAL FLOW GENERATOR, PIPING SYSTEM, SEMICONDUCTOR MANUFACTURING APPARATUS, AND HEAT EXCHANGER

Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe me...

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Bibliographische Detailangaben
1. Verfasser:	SHINDO, Toyohiko
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BYUSING INERTIA OF FLUID TO BE PUMPED PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SEMICONDUCTOR DEVICES SIPHONS WEAPONS
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Beschreibung
Zusammenfassung:	Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe member 103 through which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member 103. A rotational flow generated by the rotational flow generator 1 can reduce the amount of accretion on an inner wall of the pipe member 103.