METHOD FOR PRODUCING A FOIL-BASED PRESSURE SENSOR

A method for producing a foil-based pressure sensor includes the steps of: providing a bottom element with a bottom foil and at least one bottom electrode disposed on the bottom foil; providing a plurality of top elements, each top element having a top foil with at least one top electrode disposed u...

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Bibliographische Detailangaben
Hauptverfasser:	SCHMITZ, Klaus-Peter, SCHULER, Steffen, GOEDERT, Guenter, MASSING, Matthias, BENNES, Raphaël, SCHON, Harald
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS RELAYS SELECTORS TESTING
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Beschreibung
Zusammenfassung:	A method for producing a foil-based pressure sensor includes the steps of: providing a bottom element with a bottom foil and at least one bottom electrode disposed on the bottom foil; providing a plurality of top elements, each top element having a top foil with at least one top electrode disposed under the top foil, a combined area of the top elements being smaller than an area of the bottom element; and individually positioning and at least indirectly connecting the top elements to the bottom element so that at least one top electrode of each top element is disposed over at least one bottom electrode of the bottom element to form a sensor cell that is adapted to be activated when a pressure on the sensor cell exceeds a turn-on point. The turn-on point is adjusted by selecting a position of a top element from a plurality of positions.