CARRIER DEVICE AND CONTROL METHOD FOR CARRIER DEVICE

A carrier device is provided, which includes: a moving body; a top plate arranged above and separated from the moving body; a magnet plate including a plurality of permanent magnets arranged parallel to a predetermined moving direction on a lower surface of the top plate in a manner that adjacent polarities are different; a moving control coil unit including a plurality of exciting coils arranged on an upper surface of the moving body along and separated from the magnet plate; top gap control coil units including a plurality of exciting coils arranged on the upper surface of the moving body along and separated from the magnet plate; and a controller supplying drive currents respectively to the moving control coil unit and the top gap control coil units to make the moving body move along the moving direction, and controlling a top gap.