SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

A substrate processing apparatus includes a processing unit, a transit unit, a processing unit transfer device, an inspector and an inspector transfer device. The processing unit is configured to process a peripheral portion of a substrate. The substrate is transferred into/from the transit unit. Th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Tsujihashi, Tatsuhiko
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A substrate processing apparatus includes a processing unit, a transit unit, a processing unit transfer device, an inspector and an inspector transfer device. The processing unit is configured to process a peripheral portion of a substrate. The substrate is transferred into/from the transit unit. The processing unit transfer device is configured to perform a carry-in/carry-out of the substrate between the transit unit and the processing unit. The inspector is configured to inspect a processed state of the peripheral portion of the substrate. The inspector transfer device is configured to take out the substrate from the inspector and carry the taken substrate into the transit unit.