STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH

The invention relates to a storage apparatus to store cassettes for substrates comprising:a moveable base plate constructed and arranged to hold cassettes;an outer wall provided with an opening to receive and remove the cassettes from the base plate, anda moving device constructed and arranged to mo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Garssen, Adriaan, den Hartog-Besselink, Edwin
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The invention relates to a storage apparatus to store cassettes for substrates comprising:a moveable base plate constructed and arranged to hold cassettes;an outer wall provided with an opening to receive and remove the cassettes from the base plate, anda moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.