FORCE SENSOR

A force sensor includes a first structure, four strain generation parts, and a second structure. The first structure is formed in such a way that a third axis penetrates therethrough. The four strain generation parts are provided along first and second axes on a reference plane formed by the first a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kosaka, Yusuke, Niwa, Eiji
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A force sensor includes a first structure, four strain generation parts, and a second structure. The first structure is formed in such a way that a third axis penetrates therethrough. The four strain generation parts are provided along first and second axes on a reference plane formed by the first and second axes. The second structure is connected to the first structure with the strain generation parts interposed therebetween. The strain generation parts each includes a first beam part extending along the first axis or the second axis, and a second beam part extending in a direction orthogonal to the first beam part and connected to the first beam part at an intermediate part. The strain generation parts are formed in such a way that they are line-symmetric with respect to both the first axis and the second axis when projected in a direction of the third axis.