CONDITIONER DISK FOR USE ON SOFT OR 3D PRINTED PADS DURING CMP

A conditioner disk for use on a polishing pad during chemical mechanical polishing process includes a backing plate having a lower surface and abrasive diamond particles secured to the lower surface of the backing plate, the abrasive diamond particles disposed in a pattern that defines multiple chan...

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Bibliographische Detailangaben
Hauptverfasser:	D`Ambra, Allen L, Gopalan, Periya, Rynne, Kieran J
Format:	Patent
Sprache:	eng
Schlagworte:	ADDITIVE MANUFACTURING TECHNOLOGY ADDITIVE MANUFACTURING, i.e. MANUFACTURING OFTHREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVEAGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING,STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	A conditioner disk for use on a polishing pad during chemical mechanical polishing process includes a backing plate having a lower surface and abrasive diamond particles secured to the lower surface of the backing plate, the abrasive diamond particles disposed in a pattern that defines multiple channels for fluid flow.