HIGH FREQUENCY POWER SUPPLY MEMBER AND PLASMA PROCESSING APPARATUS
A high frequency power supply member for supplying high frequency power includes: an inner conductor that forms a hollow; and an outer conductor arranged to surround the inner conductor, wherein a refrigerant flow path is provided inside a wall surface of at least one of the inner conductor and the...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A high frequency power supply member for supplying high frequency power includes: an inner conductor that forms a hollow; and an outer conductor arranged to surround the inner conductor, wherein a refrigerant flow path is provided inside a wall surface of at least one of the inner conductor and the outer conductor. |
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