SUBSTRATE STATE DETECTION FOR PLASMA PROCESSING TOOLS

A substrate processing tool capable of detecting a gap and/or shifting of a substrate clamped to a clamping surface in a processing chamber based on observed behavior of RF power delivered to the processing chamber during processing. The behavior of the RF power is observed by comparing a voltage-cu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MCDANIEL, Thomas, BAKER, Noah Elliot
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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