MAGNETIC SENSOR MANUFACTURING

MAGNETIC SENSOR MANUFACTURING

A magnetic sensor comprising a first shield and a second shield and a sensor stack between the first and the second shield, the sensor stack having a plurality of layers wherein at least one layer is annealed using in-situ rapid thermal annealing. In one implementation of the magnetic sensor a seed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: COVINGTON, Mark William, KIEF, Mark Thomas, CHEN, Yonghua, HE, Qing, JUNG, Wonjoon
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A magnetic sensor comprising a first shield and a second shield and a sensor stack between the first and the second shield, the sensor stack having a plurality of layers wherein at least one layer is annealed using in-situ rapid thermal annealing. In one implementation of the magnetic sensor a seed layer is annealed using in-situ rapid thermal annealing. Alternatively, one of a barrier layer, an antiferromagnetic (AFM) layer, and a cap layer is annealed using in-situ rapid thermal annealing.