ROBOT HAND AND ROBOT HAVING THE SAME
A robot hand configured to grip a substrate by contacting an edge of the substrate at least two locations is provided, which includes a base body defining a gripping position at which the center of the substrate is located on a center line extending in a longitudinal direction, a sliding surface pro...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A robot hand configured to grip a substrate by contacting an edge of the substrate at least two locations is provided, which includes a base body defining a gripping position at which the center of the substrate is located on a center line extending in a longitudinal direction, a sliding surface provided on a base-end side of a second contacting part on the center line and configured to move with the second contacting part, and a mobile body slid surface provided on the base-end side of the sliding surface on the center line, and moving toward a tip end on the center line to push the sliding surface and move the sliding surface and the second contacting part toward the tip end. When the substrate is gripped, the second contacting part receives a force from the substrate and the surface slides to move the second part toward the base body. |
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