DIFFRACTIVE OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASURING DEVICE

A diffractive optical element includes a unit structure periodically arranged in a first direction and configured to diffract incident light in the first direction. The diffractive optical element has a phase pattern designed such that an angular separation between an outermost diffracted light beam...

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Bibliographische Detailangaben
Hauptverfasser: MURAKAMI, Ryota, YONEHARA, Toshiya, ONO, Kensuke, TASHIMA, Koichi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A diffractive optical element includes a unit structure periodically arranged in a first direction and configured to diffract incident light in the first direction. The diffractive optical element has a phase pattern designed such that an angular separation between an outermost diffracted light beam and a second-outermost diffracted light beam along the first direction is smaller than the divergence angle of the incident light.