ROBOT HAND AND ROBOT HAVING THE SAME

A robot hand configured to grip a substrate by contacting an edge of the substrate at at least two locations is provided, which includes a base body defining a gripping position at which the center of the substrate is located on a center line extending in a longitudinal direction, a rotary part conf...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FUKUSHIMA, Takayuki, MATSUOKA, Shogo
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A robot hand configured to grip a substrate by contacting an edge of the substrate at at least two locations is provided, which includes a base body defining a gripping position at which the center of the substrate is located on a center line extending in a longitudinal direction, a rotary part configured to be rotatable integrally with a second contacting part in a plane where the longitudinal direction intersects with a thickness direction, centering on a supported point provided on a base-end side of the second contacting part on the center line, and movable integrally with the second contacting part. The rotary part and the second contacting part integrally rotate toward the base body centering on the supported point in the plane where the longitudinal direction intersects with the thickness direction, by the second contacting part receiving a reaction force from the substrate when the substrate is gripped.