TURBO-MOLECULAR PUMP AND STATOR

A turbo-molecular pump comprises: multiple stages of rotor blades formed with multiple blades and provided in a pump axial direction; and multiple stages of stator blades provided with multiple blades, the multiple stages of the rotor blades and the multiple stages of the stator blades being alterna...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	YASUDA, Tomoki
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	A turbo-molecular pump comprises: multiple stages of rotor blades formed with multiple blades and provided in a pump axial direction; and multiple stages of stator blades provided with multiple blades, the multiple stages of the rotor blades and the multiple stages of the stator blades being alternately arranged in the pump axial direction. Each stage of the stator blade includes multiple divided stator blades, and a clearance is formed at a portion where the multiple divided stator blades face each other, and circumferential phases of the clearances of adjacent ones of the stages of the stator blades in the pump axial direction are shifted from each other.