DRILLING DEVICE WITH CONTROLLABLE FEMTOSECOND LASER PROCESSING TAPER AND DRILLING PROCESS THEREOF

A drilling device with a controllable femtosecond laser processing taper includes a femtosecond laser and a precision motion table. A support mechanism is provided along the central axis of the precision motion table, and a clamp is provided on the top of the support mechanism. The output end of the...

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Bibliographische Detailangaben
Hauptverfasser:	MA, Guang, LU, Chengji, LI, Xiaogang, XUE, Yao, ZHONG, Rong, LIN, Liqu, LI, Fengping, FENG, Guang, PANG, Jihong, ZHU, Dehua
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A drilling device with a controllable femtosecond laser processing taper includes a femtosecond laser and a precision motion table. A support mechanism is provided along the central axis of the precision motion table, and a clamp is provided on the top of the support mechanism. The output end of the femtosecond laser is provided with a beam expander. The output end of the beam expander is provided with a reflection mirror. The output end of the reflection mirror is provided with a beam scanning module. The output end of the beam scanning module is provided with a semi-focusing mirror. The output end of the semi-focusing mirror is provided with a semi-transmissive reflection mirror arranged at 45 degrees. The reflection output end of the semi-transmissive reflection mirror is provided with a high-precision three-dimensional on-line monitoring module, and the transmission output end of the semi-transmissive reflection mirror faces the clamp.