SYSTEMS FOR WORKPIECE PROCESSING WITH PLASMA

Systems, methods, and apparatuses for workpiece processing with plasma, including thermal isolation of a workpiece holder assembly, are described. An apparatus includes a chamber that at least partially defines a processing space for generating plasma. The apparatus includes a base assembly that at...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bolden, Thomas V, Harroun, James, Guinn, John, Condrashoff, Bob
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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