DETERMINING LOCATIONS OF SUSPECTED DEFECTS

A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.

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Bibliographische Detailangaben
Hauptverfasser:	Ben-Shlomo, Tal, Youn, Dae Hwan, Segal, Dan, Greenberg, Ofir
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.