MICROFLUIDIC CHIP, HEAD, AND DISPENSING DEVICE FOR DISPENSING FLUIDS CONTAINING AN ACIDIC COMPONENT

A microfluidic ejection chip includes a silicon substrate having a fluid passageway. The fluid passageway is defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid. The permanent passiva...

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Hauptverfasser:	Weaver, Sean T, Bernard, David L
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL TRANSPORTING
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creator	Weaver, Sean T Bernard, David L
description	A microfluidic ejection chip includes a silicon substrate having a fluid passageway. The fluid passageway is defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid. The permanent passivation layer is retained on the silicon sidewall at a conclusion of etching of the silicon substrate to form the fluid passageway.
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subjects	CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL TRANSPORTING
title	MICROFLUIDIC CHIP, HEAD, AND DISPENSING DEVICE FOR DISPENSING FLUIDS CONTAINING AN ACIDIC COMPONENT
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