MICROFLUIDIC CHIP, HEAD, AND DISPENSING DEVICE FOR DISPENSING FLUIDS CONTAINING AN ACIDIC COMPONENT

MICROFLUIDIC CHIP, HEAD, AND DISPENSING DEVICE FOR DISPENSING FLUIDS CONTAINING AN ACIDIC COMPONENT

A microfluidic ejection chip includes a silicon substrate having a fluid passageway. The fluid passageway is defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid. The permanent passiva...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Weaver, Sean T, Bernard, David L
Format: Patent
Sprache:eng
Schlagworte:
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A microfluidic ejection chip includes a silicon substrate having a fluid passageway. The fluid passageway is defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid. The permanent passivation layer is retained on the silicon sidewall at a conclusion of etching of the silicon substrate to form the fluid passageway.