SUBSTRATE TRANSFER DEVICE AND METHOD OF OPERATING THE SAME

SUBSTRATE TRANSFER DEVICE AND METHOD OF OPERATING THE SAME

A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OKADA, Hiroyuki, FUKUSHIMA, Takayuki, KINOSHITA, Shinya, MATSUOKA, Shogo
Format: Patent
Sprache:eng
Schlagworte:
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
TRANSPORTING
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Beschreibung
Zusammenfassung:A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substrate gripping hand, then operate the actuator so that a first principal surface of the substrate is located above a base member, and a normal line of the first principal surface is oriented downward from a horizontal plane, and move a movable guiding member toward the tip-end part of the base member so that the second engaging member, a third engaging member, and the movable guiding member grip the substrate.