GERMANIUM-BASED LASER DIODE

A method is presented for forming a germanium (Ge) laser diode with direct bandgap for laser generation. The method includes forming an intrinsic Ge active layer over a substrate, forming a p+ region and an n+ region adjacent the intrinsic Ge active layer, such that the p+ region, the n+ region, and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Cheng, Kangguo, Liu, Zuoguang
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method is presented for forming a germanium (Ge) laser diode with direct bandgap for laser generation. The method includes forming an intrinsic Ge active layer over a substrate, forming a p+ region and an n+ region adjacent the intrinsic Ge active layer, such that the p+ region, the n+ region, and the intrinsic Ge active layer collectively define a p-i-n diode, and forming metal contacts to the p+ and n+ regions.