VERTICAL CONDUCTION ELECTRONIC POWER DEVICE HAVING A REDUCED ON RESISTANCE AND MANUFACTURING PROCESS THEREOF

VERTICAL CONDUCTION ELECTRONIC POWER DEVICE HAVING A REDUCED ON RESISTANCE AND MANUFACTURING PROCESS THEREOF

A vertical conduction electronic power device includes a body delimited by a first and a second surface and having an epitaxial layer of semiconductor material, and a substrate. The epitaxial layer is delimited by the first surface of the body and the substrate is delimited by the second surface of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCURATI, Mario Giovanni, PATTI, Davide Giuseppe, MORELLI, Marco
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A vertical conduction electronic power device includes a body delimited by a first and a second surface and having an epitaxial layer of semiconductor material, and a substrate. The epitaxial layer is delimited by the first surface of the body and the substrate is delimited by the second surface of the body. The epitaxial layer houses at least a first and a second conduction region having a first type of doping and a plurality of insulated-gate regions, which extend within the epitaxial layer. The substrate has at least one silicide region, which extends starting from the second surface of the body towards the epitaxial layer.