Systems and Methods for Purifying Solvents
The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process. |
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