INORGANIC PACKAGE FILM, MANUFACTURING METHOD THEREOF, MANUFACTURING METHOD OF OLED PACKAGE FILM, DISPLAY PANEL, AND DISPLAY DEVICE

INORGANIC PACKAGE FILM, MANUFACTURING METHOD THEREOF, MANUFACTURING METHOD OF OLED PACKAGE FILM, DISPLAY PANEL, AND DISPLAY DEVICE

An inorganic package film, a manufacturing method thereof, a manufacturing method of an OLED package film, a display panel, and a display device. The manufacturing method includes forming a first inorganic package film on a device to be packaged by a chemical vapor deposition process; and forming a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUN, Quanqin, CUI, Fuyi, CHEN, Xu, XIAO, Ang
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:An inorganic package film, a manufacturing method thereof, a manufacturing method of an OLED package film, a display panel, and a display device. The manufacturing method includes forming a first inorganic package film on a device to be packaged by a chemical vapor deposition process; and forming a second inorganic package film on the first inorganic package film by an atomic layer deposition process.