OPTICAL WAVEGUIDE DEVICE

An optical waveguide device including an optical waveguide substrate that has an electro-optic effect, is a crystal having anisotropy in thermal expansion rate, has a thickness set to 10 μm or lower, and includes an optical waveguide and a holding substrate that holds the optical waveguide substrate...

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Bibliographische Detailangaben
Hauptverfasser: KONDO, Katsutoshi, KUGIMOTO, Yuki, MURATA, Yumi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An optical waveguide device including an optical waveguide substrate that has an electro-optic effect, is a crystal having anisotropy in thermal expansion rate, has a thickness set to 10 μm or lower, and includes an optical waveguide and a holding substrate that holds the optical waveguide substrate, the optical waveguide substrate and the holding substrate being joined to each other, in which the holding substrate is formed of a crystal having a lower dielectric constant than the optical waveguide substrate and having anisotropy in thermal expansion rate, and the optical waveguide substrate and the holding substrate are joined to each other such that differences in thermal expansion rate between the optical waveguide substrate and the holding substrate become small in different axial directions on a joint surface.