LOW-K MATERIAL AND METHOD FOR MANUFACTURING THE SAME

A method of forming low-k material is provided. The method includes providing a plurality of core-shell particles. The core of the core-shell particles has a first ceramic with a low melting point. The shell of the core-shell particles has a second ceramic with a low melting point and a low dielectr...

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Hauptverfasser: LIU, Tzu-Yu, LIN, Cheng-Ting, CHIU, Kuo-Chuang, HUANG, Tien-Heng, CHOU, Tzu-Chi
Format: Patent
Sprache:eng
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Zusammenfassung:A method of forming low-k material is provided. The method includes providing a plurality of core-shell particles. The core of the core-shell particles has a first ceramic with a low melting point. The shell of the core-shell particles has a second ceramic with a low melting point and a low dielectric constant. The core-shell particles are sintered and molded to form a low-k material. The shell of the core-shell particles is connected to form a network structure of a microcrystal phase.