SPATIAL LIGHT MODULATOR (SLM) COMPRISING INTEGRATED DIGITAL-TO-ANALOG CONVERTERS
Arrangement for controlling micromechanical actuators, including a digital-to-analog converter and a plurality of micromechanical actuators; wherein the micromechanical actuators are coupled to a connecting structure; wherein the digital-to-analog converter is configured to provide a voltage to be a...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Arrangement for controlling micromechanical actuators, including a digital-to-analog converter and a plurality of micromechanical actuators; wherein the micromechanical actuators are coupled to a connecting structure; wherein the digital-to-analog converter is configured to provide a voltage to be applied to the connecting structure by an adjustable capacitive voltage division that is dependent on a digital input value of the digital-to-analog converter, wherein the digital-to-analog converter is configured to directly include a capacitance of the connecting structure in the capacitive voltage division. |
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