Apparatus For Non-Volatile Random Access Memory Stacks

A memory structure is provided, including a NAND block comprising a plurality of oxide layers, the plurality of layers forming a staircase structure at a first edge of the NAND block, a plurality of vias disposed on the staircase structure of NAND block, two or more of plurality of vias terminating...

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Bibliographische Detailangaben
Hauptverfasser: Cheng, Pearl Po-Yee, Katkar, Rajesh, Haba, Belgacem, Delacruz, Javier A
Format: Patent
Sprache:eng
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Zusammenfassung:A memory structure is provided, including a NAND block comprising a plurality of oxide layers, the plurality of layers forming a staircase structure at a first edge of the NAND block, a plurality of vias disposed on the staircase structure of NAND block, two or more of plurality of vias terminating along a same plane, a plurality of first bonding interconnects disposed on the plurality of vias, a plurality of bitlines extending across the NAND block, and a plurality of second bonding interconnects disposed along the bitlines. The memory structure may be stacked on another of the memory structure to form a stacked memory device.