ELECTRIC FIELD SENSOR WITH SENSITIVITY-ATTENUATING GROUND RING

An electric field sensor includes an insulating substrate, a plurality of electrodes, an insulator, a plurality vias, and a ground ring. The electrodes are disposed on the substrate. The insulator is disposed over the electrodes. The vias are coupled to the electrodes and extend through the substrat...

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Hauptverfasser: Linfield, Dana, Nolan, Chris, Abraham, Ruth, Inkpen, Stuart, Swamidas, Joshua, Conway, Bill, Bonnell, David
Format: Patent
Sprache:eng
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Zusammenfassung:An electric field sensor includes an insulating substrate, a plurality of electrodes, an insulator, a plurality vias, and a ground ring. The electrodes are disposed on the substrate. The insulator is disposed over the electrodes. The vias are coupled to the electrodes and extend through the substrate at a right angle to the electrodes. The ground ring is disposed around the electrodes and the vias and is configured to attenuate a sensitivity of the sensor to electric fields outwards of the ground ring.