DIFFERENTIAL PRESSURE GAUGE

The differential pressure gauge includes a base, a first part disposed on an upper surface of the base, a second part disposed on the first part, and a diaphragm layer disposed between the first part and the second part. A wall is formed in a second pressure chamber formed in the second part between...

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Bibliographische Detailangaben
Hauptverfasser: TOJO, Hirofumi, Kida, Nozomi, Tokuda, Tomohisa
Format: Patent
Sprache:eng
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Zusammenfassung:The differential pressure gauge includes a base, a first part disposed on an upper surface of the base, a second part disposed on the first part, and a diaphragm layer disposed between the first part and the second part. A wall is formed in a second pressure chamber formed in the second part between a first region on a side including a pressure-receiving portion and a second region on a side including a first through-hole, with a gap defined with respect to inner walls of the second pressure chamber.