COATING METHOD, COATING BAR HEAD AND COATING APPARATUS

An embodiment of the present invention provides a coating method, a coating bar head and a coating apparatus which enables coating in which changes in coating film thickness is less likely to occur, even when performing meniscus coating at a high speed. This coating method is a coating method includ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SHIDA, Naomi, NAITO, Katsuyuki, SAITO, Mitsunaga, SAITA, Yutaka
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	An embodiment of the present invention provides a coating method, a coating bar head and a coating apparatus which enables coating in which changes in coating film thickness is less likely to occur, even when performing meniscus coating at a high speed. This coating method is a coating method including: supplying a coating liquid between a coating bar head and a substrate to form a meniscus; and moving the substrate, wherein a cross section of the coating surface of the bar head in the direction of coating, is a convex curve, and has bending points at both ends of the curve.