METHOD AND SYSTEM FOR IMPROVING THE OPERATION OF SEMICONDUCTOR PROCESSING

The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.

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Bibliographische Detailangaben
Hauptverfasser:	SHANBHAG, Jeevan, CHEN, Chun-Chung, SALIMIAN, Siamak, CHO, Tom K, YANG, Yao-Hung, LIAO, Chien-Min, GANON, David, LUIGI, Mariana, HUNTER, Earl, YANG, Hsui
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.