Charged Particle Beam System, Method for Determining Range for Automatically Searching for Focal Point Position in Charged Particle Beam Device, and Non-Transitory Storage Medium Recording Program for Causing Computer System to Determine Range for Automatically Searching for Focal Position in Charged Particle Beam Device

The present disclosure provides a technique for reducing man-hour of a user required for setting an automatic focused focal point search function of an electron beam and facilitating observation of a sample when reviewing a defect using an electron microscope. The present disclosure provides a technique in a charged particle beam system, in which an appropriate focal point position search width can be automatically set in consideration of convergence accuracy and an operation time based on a focal point measure distribution width for a focal point position acquired in advance under the same conditions and a difference between focal point positions before and after automatic focused focal point position search.