PLASMA GENERATION DEVICE AND PLASMA IRRADIATION METHOD

Atmospheric-pressure plasma generation device 10 of the present invention includes heat sinks 27 and 28. Flow paths are formed in the heat sinks, and cooling gas flows in the flow paths, thereby cooling lower housing 20 in which a reaction chamber is formed. Here, the gas used for cooling is warmed...

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Bibliographische Detailangaben
Hauptverfasser:	JINDO, Takahiro, IKEDO, Toshiyuki
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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