SECONDARY CHARGED PARTICLE IMAGING SYSTEM

SECONDARY CHARGED PARTICLE IMAGING SYSTEM

A secondary charged particle imaging system comprising: a backscattered electron detector module, wherein the backscattered electron detector module is rotatable between a first angular position and a second angular position about an axis.

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Bibliographische Detailangaben
Hauptverfasser: Firnkes, Matthias, Lanio, Stefan, Lampersberger, Florian
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A secondary charged particle imaging system comprising: a backscattered electron detector module, wherein the backscattered electron detector module is rotatable between a first angular position and a second angular position about an axis.