LIGHT PROPAGATION TIME PIXEL AND LIGHT PROPAGATION TIME SENSOR WITH CORRESPONDING PIXEL

The disclosure relates to a light propagation time pixel, comprising modulation gates and integration nodes which are arranged on the upper face of a photosensitive semiconductor region. The photosensitive semiconductor region is designed as an N-epitaxy and is delimited laterally and/or at the corn...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FRANKE, Matthias, RÖSSLER, Robert
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The disclosure relates to a light propagation time pixel, comprising modulation gates and integration nodes which are arranged on the upper face of a photosensitive semiconductor region. The photosensitive semiconductor region is designed as an N-epitaxy and is delimited laterally and/or at the corners by p-doped vertical p-structures. A buried layer with a p-doping adjoins the lower face of the photosensitive semiconductor region, and the vertical p-structures are in electric contact with the buried layer.