SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RECEPTACLE STORAGE METHOD

A substrate processing apparatus configured to process a substrate includes a substrate receptacle placing unit configured to place thereon a substrate receptacle accommodating therein the substrate to be processed; and a storage zone provided adjacent to the substrate receptacle placing unit to sto...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ide, Kousei, Tsujihashi, Tatsuhiko, Teramoto, Akihiro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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