AIR CONTROL CABINET MODULE AND CLEAN ROOM SYSTEM HAVING THE SAME

The present disclosure provides an air control cabinet (ACC) module for a clean room system. The clean room system has a clean fab and a clean sub-fab. The clean fab of the clean room system is configured to be disposed with at least one wafer processing apparatus. The ACC module includes an ACC inl...

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Bibliographische Detailangaben
Hauptverfasser:	YOO, JIYONG, KWON, BYUNG-IN, YANG, HYUN-SUK, JEON, BUM-HWAN, KIM, SOO-HYOUNG, KIM, SUNG-UK
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING RANGES SEMICONDUCTOR DEVICES VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	The present disclosure provides an air control cabinet (ACC) module for a clean room system. The clean room system has a clean fab and a clean sub-fab. The clean fab of the clean room system is configured to be disposed with at least one wafer processing apparatus. The ACC module includes an ACC inlet tube, a main cabinet, and an ACC pipeline. The ACC inlet tube is configured to supply air from the clean fab of the clean room system to the ACC module. The main cabinet is connected to the ACC inlet tube and configured to generate clean air from the air supplied from the ACC inlet tube. The ACC pipeline is connected to the main cabinet and configured to supply the clean air generated by the main cabinet to the wafer processing apparatus in the clean fab of the clean room system.