FLUID SUPPLY DEVICE AND FLUID SUPPLY METHOD

A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies carbon dioxide in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied carbon dioxide stored in the tank toward the processing chamber, and a damper part that is provided to a flow path communicating with a discharge side of the pump and suppresses periodic pressure fluctuations of the liquid discharged from the pump. The damper part includes a spiral tube formed into a spiral shape that is fixed at both end portions in predetermined positions, and allows the liquid discharged from the pump to flow therethrough.