DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

A developing treatment apparatus for performing a developing treatment on a treatment object substrate, the developing treatment apparatus includes: a rotating and holding part configured to hold and rotate the treatment object substrate; a discharger configured to discharge a predetermined solution...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TOSU, Hidenori, NAITOU, Ryouichirou, KURE, Seiichi, YAMAGUCHI, Takahiro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY ELECTROPHOTOGRAPHY HOLOGRAPHY MAGNETOGRAPHY PHOTOGRAPHY PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A developing treatment apparatus for performing a developing treatment on a treatment object substrate, the developing treatment apparatus includes: a rotating and holding part configured to hold and rotate the treatment object substrate; a discharger configured to discharge a predetermined solution relating to the developing treatment to the treatment object substrate held on the rotating and holding part; and a destaticizer configured to supply ions ionized by an X-ray to the predetermined solution discharged to the treatment object substrate held on the rotating and holding part, to destaticize the predetermined solution.