Fluid Control Device

A fluid control device 1 includes an information processing module 5 provided in the device, a valve body 11 having a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 that is fixed to the actuator body 12 and has a side surface on which a through hole 133d is formed, a p...

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Bibliographische Detailangaben
Hauptverfasser: Komehana, Katsunori, Tanno, Ryutaro, Harada, Akihiro, Suzuki, Yuya, Ochiishi, Masahiko, Shinohara, Tsutomu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A fluid control device 1 includes an information processing module 5 provided in the device, a valve body 11 having a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 that is fixed to the actuator body 12 and has a side surface on which a through hole 133d is formed, a piston 126 that is provided in the actuator body 12 and in which a driving pressure introduction path 126b that communicates with a driving pressure introduction chamber S2 is formed, and an introduction pipe 21 through which driving pressure is introduced, the introduction pipe having one end inserted to the driving pressure introduction path 126b and another end leading to an outside through the through hole 133d of the casing 13.